JPH053984Y2 - - Google Patents

Info

Publication number
JPH053984Y2
JPH053984Y2 JP17129987U JP17129987U JPH053984Y2 JP H053984 Y2 JPH053984 Y2 JP H053984Y2 JP 17129987 U JP17129987 U JP 17129987U JP 17129987 U JP17129987 U JP 17129987U JP H053984 Y2 JPH053984 Y2 JP H053984Y2
Authority
JP
Japan
Prior art keywords
electret
electrets
acceleration
leaf spring
movable electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP17129987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0175859U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17129987U priority Critical patent/JPH053984Y2/ja
Publication of JPH0175859U publication Critical patent/JPH0175859U/ja
Application granted granted Critical
Publication of JPH053984Y2 publication Critical patent/JPH053984Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP17129987U 1987-11-11 1987-11-11 Expired - Lifetime JPH053984Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17129987U JPH053984Y2 (en]) 1987-11-11 1987-11-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17129987U JPH053984Y2 (en]) 1987-11-11 1987-11-11

Publications (2)

Publication Number Publication Date
JPH0175859U JPH0175859U (en]) 1989-05-23
JPH053984Y2 true JPH053984Y2 (en]) 1993-01-29

Family

ID=31463007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17129987U Expired - Lifetime JPH053984Y2 (en]) 1987-11-11 1987-11-11

Country Status (1)

Country Link
JP (1) JPH053984Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005098727A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
JP4574324B2 (ja) * 2004-10-05 2010-11-04 株式会社共和電業 起歪体、物理量/電気量変換器および起歪体の製造方法

Also Published As

Publication number Publication date
JPH0175859U (en]) 1989-05-23

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